Microelectromechanical Sensors and Microstructures in Aerospace Applications

Glucose-Sensitive Holographic (Bio)Sensors: Fundamentals and Applications

Nowadays sensors and especially biosensors play an important role in medical diagnosis and detection of food and environment contaminations. Biosensors’ facilities have been improved significantly by using technologies such as surface plasmon resonance, microfluidics, laser, and electrochemistry. These technologies are now available on chips in micro- and nano-scale and are capable of mea...

Carbon nanotubes as piezoresistive microelectromechanical sensors: Theory and experiment

Applications of the Microelectromechanical Systems in Nanoscience

The miniaturization and development of complex Micro Electro Mechanical Systems (MEMS) led to a need for an increase in performance of such systems in terms of displacement range, accuracy, velocity etc. There is a huge potential of using them as tools in nanonoscience such as high-density probe memory applications, scanning probe microscopy (e.g. nanolithography, prototyping of nanostructures)...

Piezoelectric microelectromechanical resonant sensors for chemical and biological detection.

Piezoelectric microelectromechanical systems (MEMS) resonant sensors, known for their excellent mass resolution, have been studied for many applications, including DNA hybridization, protein-ligand interactions, and immunosensor development. They have also been explored for detecting antigens, organic gas, toxic ions, and explosives. Most piezoelectric MEMS resonant sensors are acoustic sensors...

Microelectromechanical systems (MEMS): fabrication, design and applications

Micromachining and micro-electromechanical system (MEMS) technologies can be used to produce complex structures, devices and systems on the scale of micrometers. Initially micromachining techniques were borrowed directly from the integrated circuit (IC) industry, but now many unique MEMS-specific micromachining processes are being developed. In MEMS, a wide variety of transduction mechanisms ca...